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Krypton Neon Specialty Gas Mixtures 248nm Lithography Process

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Description

Krypton Neon Specialty Gas Mixtures 248nm Lithography Process

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Description:

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Specialty Gas Mixtures

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Krypton Neon Mixtures are used in 248 nm lithography applications, usually in conjunction with a halogen gas mixture.

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Krypton, like the other noble gases, is used in lighting and photography. Krypton light has many spectral lines, and krypton plasma is useful in bright, high-powered gas lasers (krypton ion and excimer lasers), each of which resonates and amplifies a single spectral line. Krypton fluoride also makes a useful laser.

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Specifications:

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1. Physical properties

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Major Components |
COMPONENTS | CONCENTRATION | RANGE |
Krypton | 1.25% | 1.2-1.3% |
Neon | Balance | ? |
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2. Typical technical data (COA)

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Maximum Impurities |
COMPONENTS | CONCENTRATION (ppm) |
Carbon Dioxide (CO2) | <0.5 |
Carbon Monoxide (CO) | <0.5 |
Carbon Tetrafluoride (CF4) | <0.5 |
Helium (He) | <8.0 |
Moisture (H2O) | <0.5 |
Nitrogen (N2) | <1.0 |
Oxygen (O2) | <0.5 |
THC (as Methane) (CH4) | <0.5 |
Xe | <1.0 |
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Cylinder Specifications | Contents | Pressure |
Cylinder | Valve Outlet Options | Cubic Feet | Liters | PSIG | BAR |
1 | CGA580 | DIS718 | 265 | 7500 | 2000 | 139 |
2 | CGA580 | DIS718 | 212 | 6000 | 2000 | 139 |
3 | CGA580 | DIS718 | 71 | 2000 | 1800 | 125 |
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Applications:

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? 1. | Krypton is used in some photographic flashes for high speed photography. Krypton gas is also combined with other gases to make luminous signs that glow with a bright greenish-yellow light. ? |
2. | ? As The krypton fluoride laser. ? |
3. | ? Use In experimental particle physics ? |
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