Machinery & Equipment
Transparent Conductive Film Vacuum Coating Machine Optical Thin Film Coating Equipment
ZZS920
Description
This equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating anti-reflection film, bandpass film ,IR-Cut filter etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. It& acute;s the ideal equipment for coating high precision optical thin film.
Model:ZZS-920 Optical thin film coater
Vacuum Chamber:SUS304,Φ920mm×H1000mm
Substrate Dome Size:Φ870mm
Substrate Dome Rotation Speed:3rpm to 30rpm(Variable)
Optical Film Thickness Control System:SQC310+6point rotary sensor,full automatic coating control system
Evaporation Source:5kw EB source: 1 units, resistance evaporation
Vacuum System:Rotary Pump + Roots Pump +Diffusion Pumps
Performance:Ultimate Vacuum4.0×10-3Pa
Recover vacuum:From atmosphere to 4 x 10-3 Pa≦12min.
Substrate Heater:350℃ (max.)
Power Requirements:three-phase ,220V/380V±5%,50HZ
Cooling Water Flow Rate:100 /min or greater
Compressed Air Pressure:0.6~0.8MPa
Optical Thin Film Application:
1.For clean energy:
Transparent conductive film, IR cut coating, decoration coating etc.( LED )
2.For display:
AR Coating, Dichroic Mirror, PBS, Cold Mirror etc.
AR/AS(AR/Anti Electromagnetic wave coating) etc.
ITO Transparent Conductive Film etc.(Optical parts and lenses in liqid crystal)
3.For Optical Communication:
NBPF, BBPF, Edge filter, AR Coating, GFF etc.( DWDM Filter )
4.Semiconductors:
AR Coating, BPF, Edge filter, HR Coating etc.(lenses and optical parts for semiconductor industry facilities laser, optical switch)
5.Optical Storage Media:
AR Coating, BS Coating etc.( optical parts and components for optical disks such as DVD,CDRW,CDR,CD)
6.For Bio-Industry :
BPF,Edge filter,AR Coating,Mirror, HR Coating,Cold Mirror etc.( Optical parts and lenses
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Chengdu Guotai Vacuum Equipment Co.,Ltd
optical coating machine,vacuum coating machine,AR optical coating machine,IR optical coating machine,UV optical coating machine,optical filter vacuum coating machine
Address: Park 2, Unit 12, No.688, Kexing West Road, Cross-Straits IT Industry Development Zone, Wenjiang District, Chengdu, Sichuan, China (Mainland)/610000,
Chengdu, Sichuan
China, 610000
Tel: 86-28-82666357
Fax: 86-28-82666193