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Description
Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon. The solar panel manufacturing industry is one of the major emitters of hexafluoroethane, which has a greenhouse gas potential 12,000 times greater than CO2.
Together with trifluoromethane it is used in refrigerants R508A (61%) and R508B (54%).
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Central China Special Gas Co., Ltd.
Helium, Neon, Argon, Krypton, Xenon, gas cylinder, hydrogen, carbon dioxide, carbon monoxide, chlorine, ammonia, nitric oxide, nitrous oxide, ethane, propane, methane
Address: Jiefang Rd,
Hengyang, Hunan
China, 421000
Tel: 0086-734-8755678
Fax: 86-734-8123618
